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Sputtering is a physical process in which atoms in a solid-state (target) are released and pass into the gas phase by bombardment with energetic ions (mainly noble gas ions). IntroductionSputtering is usually understood as the sputter deposition, a high vacuum-based coating technique belonging to the group of PVD processes. Furthermore, sputtering in surface physics is used as a cleaning method for the preparation of high-purity surfaces and as a method for analyzing the chemical …